Oxidation process of SiGe on SOI substrates: Fid-Bau Portal

Oxidation process of SiGe on SOI substrates

Jin, B. / Wang, X. / Chen, J. / Zhang, F. / Cheng, X. / Chen, Z.

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Oxidation process of SiGe on SOI substrates

Jin, B. / Wang, X. / Chen, J. / Zhang, F. / Cheng, X. / Chen, Z.

Oxidation process of SiGe on SOI substrates

Jin, B. / Wang, X. / Chen, J. / Zhang, F. / Cheng, X. / Chen, Z.

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Access via TIB

Check availability in my library

Order at Subito €

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Document information

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Document information

Title:

Oxidation process of SiGe on SOI substrates

Contributors:

Jin, B. (author) / Wang, X. (author) / Chen, J. (author) / Zhang, F. (author) / Cheng, X. (author) / Chen, Z. (author)

Published in:

APPLIED SURFACE SCIENCE ; 252 ; 5627-5631

Publication date:

2006-01-01

Size:

5 pages

ISSN:

0169-4332

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 621.35

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