Strain relaxation in SiGe layer during wet oxidation process

Zhang, Y. / Cai, K. / Li, C. et al. | British Library Online Contents | 2009

Formation of thin SiGe virtual substrates by ion implantation into Si substrates

Sawano, K. / Koh, S. / Hirose, Y. et al. | British Library Online Contents | 2004

Modeling of low temperature SiGe oxidation

Mane, S. S. / Hameed, S. / Saha, A. R. et al. | British Library Online Contents | 2006

Epitaxial growth of Ge and SiGe on Si substrates

Nylandsted Larsen, A. | British Library Online Contents | 2006

Defects in SiGe virtual substrates for high mobility electron gas

Di Gaspare, L. / Fiorini, P. / Scappucci, G. et al. | British Library Online Contents | 2001