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Modeling of low temperature SiGe oxidation

Mane, S. S. / Hameed, S. / Saha, A. R. / Maiti, C. K.

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Modeling of low temperature SiGe oxidation

Mane, S. S. / Hameed, S. / Saha, A. R. / Maiti, C. K.

Modeling of low temperature SiGe oxidation

Mane, S. S. / Hameed, S. / Saha, A. R. / Maiti, C. K.

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Check availability in my library

Order at Subito €

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Document information

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Document information

Title:

Modeling of low temperature SiGe oxidation

Contributors:

Mane, S. S. (author) / Hameed, S. (author) / Saha, A. R. (author) / Maiti, C. K. (author)

Published in:

MATERIALS SCIENCE IN SEMICONDUCTOR PROCESSING ; 9 ; 668-672

Publication date:

2006-01-01

Size:

5 pages

ISSN:

1369-8001

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 621.38152

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