Morphological defects and uniformity issues of 4H-SiC homoepitaxial layers grown on off-oriented (0001) Si faces: Fid-Bau Portal

Morphological defects and uniformity issues of 4H-SiC homoepitaxial layers grown on off-oriented (0001) Si faces

Sun, G. S. / Liu, X. F. / Gong, Q. C. / Wang, L. / Zhao, W. S. / Li, J. Y. / Zeng, Y. P. / Li, J. M.

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Morphological defects and uniformity issues of 4H-SiC homoepitaxial layers grown on off-oriented (0001) Si faces

Sun, G. S. / Liu, X. F. / Gong, Q. C. / Wang, L. / Zhao, W. S. / Li, J. Y. / Zeng, Y. P. / Li, J. M.

Morphological defects and uniformity issues of 4H-SiC homoepitaxial layers grown on off-oriented (0001) Si faces

Sun, G. S. / Liu, X. F. / Gong, Q. C. / Wang, L. / Zhao, W. S. / Li, J. Y. / Zeng, Y. P. / Li, J. M.

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Title:

Morphological defects and uniformity issues of 4H-SiC homoepitaxial layers grown on off-oriented (0001) Si faces

Contributors:

Sun, G. S. (author) / Liu, X. F. (author) / Gong, Q. C. (author) / Wang, L. (author) / Zhao, W. S. (author) / Li, J. Y. (author) / Zeng, Y. P. (author) / Li, J. M. (author)

Published in:

MATERIALS SCIENCE IN SEMICONDUCTOR PROCESSING ; 9 ; 275-278

Publication date:

2006-01-01

Size:

4 pages

ISSN:

1369-8001

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 621.38152

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Crystallographic Defects under Surface Morphological Defects of 4H-SiC Homoepitaxial Films

Okada, T. / Kimoto, T. / Yamai, K. et al. | British Library Online Contents | 2004

Origin of Surface Morphological Defects in 4H-SiC Homoepitaxial Films

Okada, T. / Okamoto, K. / Ochi, K. et al. | British Library Online Contents | 2006

Defect Characterization of Homo-Epitaxially Grown 6H-SiC on (0001) Silicon and (0001) Carbon Faces

Stoemenos, J. / Di Cioccio, L. / Papaioannou, V. et al. | British Library Online Contents | 1998

Structure and Origin of Carrot Defects on 4H-SiC Homoepitaxial Layers

Dong, L. / Sun, G.S. / Yu, J. et al. | British Library Online Contents | 2014