Ultra Shallow Depth Profiling with SIMS

Ehrke, H.-U. | British Library Online Contents | 2008

TOF-SIMS depth profiling of SIMON

Xin, G. / Dong, G. / Xu, C. et al. | British Library Online Contents | 2003

Surface roughening effect in sub-keV SIMS depth profiling

Liu, R. / Ng, C. M. / Wee, A. T. | British Library Online Contents | 2003

SIMS depth profiling of working environment nanoparticles

Konarski, P. / Iwanejko, I. / Mierzejewska, A. | British Library Online Contents | 2003

Accurate SIMS depth profiling for ultra-shallow implants using backside SIMS

Hongo, C. / Tomita, M. / Takenaka, M. et al. | British Library Online Contents | 2003