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    Depth profiling using C60+ SIMS-Deposition and topography development during bombardment of silicon

    New search for: Gillen, G.
    New search for: Batteas, J.
    New search for: Michaels, C. A.
    New search for: Chi, P.
    New search for: Small, J.
    New search for: Windsor, E.
    New search for: Fahey, A.
    New search for: Verkouteren, J.
    New search for: Kim, K. J.

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    Depth profiling using C60+ SIMS-Deposition and topography development during bombardment of silicon

    New search for: Gillen, G.
    New search for: Batteas, J.
    New search for: Michaels, C. A.
    New search for: Chi, P.
    New search for: Small, J.
    New search for: Windsor, E.
    New search for: Fahey, A.
    New search for: Verkouteren, J.
    New search for: Kim, K. J.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Depth profiling using C60+ SIMS-Deposition and topography development during bombardment of silicon

    New search for: Gillen, G.
    New search for: Batteas, J.
    New search for: Michaels, C. A.
    New search for: Chi, P.
    New search for: Small, J.
    New search for: Windsor, E.
    New search for: Fahey, A.
    New search for: Verkouteren, J.
    New search for: Kim, K. J.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Page navigation

    Document information
    Similar titles

    Export, share and cite

    Document information
    Title:

    Depth profiling using C60+ SIMS-Deposition and topography development during bombardment of silicon

    Contributors:

    Gillen, G. (author) / Batteas, J. (author) / Michaels, C. A. (author) / Chi, P. (author) / Small, J. (author) / Windsor, E. (author) / Fahey, A. (author) / Verkouteren, J. (author) / Kim, K. J. (author)

    Published in:

    APPLIED SURFACE SCIENCE ; 252 ; 6521-6525

    Publication date:

    2006-01-01

    Size:

    5 pages

    ISSN:

    0169-4332

    Type of media:

    Article (Journal)

    Type of material:

    Print

    Language:

    English

    Classification:

    DDC:  621.35

    © Metadata Copyright the British Library Board and other contributors. All rights reserved.

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