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Quantitative SIMS analysis of SiGe composition with low energy O2+ beams

Jiang, Z. X. / Kim, K. / Lerma, J. / Corbett, A. / Sieloff, D. / Kottke, M. / Gregory, R. / Schauer, S.

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Quantitative SIMS analysis of SiGe composition with low energy O2+ beams

Jiang, Z. X. / Kim, K. / Lerma, J. / Corbett, A. / Sieloff, D. / Kottke, M. / Gregory, R. / Schauer, S.

Quantitative SIMS analysis of SiGe composition with low energy O2+ beams

Jiang, Z. X. / Kim, K. / Lerma, J. / Corbett, A. / Sieloff, D. / Kottke, M. / Gregory, R. / Schauer, S.

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Check availability in my library

Order at Subito €

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Document information

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Document information

Title:

Quantitative SIMS analysis of SiGe composition with low energy O2+ beams

Contributors:

Jiang, Z. X. (author) / Kim, K. (author) / Lerma, J. (author) / Corbett, A. (author) / Sieloff, D. (author) / Kottke, M. (author) / Gregory, R. (author) / Schauer, S. (author)

Published in:

APPLIED SURFACE SCIENCE ; 252 ; 7262-7264

Publication date:

2006-01-01

Size:

3 pages

ISSN:

0169-4332

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 621.35

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