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Boron ultra low energy SIMS depth profiling improved by rotating stage

Bersani, M. / Giubertoni, D. / Iacob, E. / Barozzi, M. / Pederzoli, S. / Vanzetti, L. / Anderle, M.

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Boron ultra low energy SIMS depth profiling improved by rotating stage

Bersani, M. / Giubertoni, D. / Iacob, E. / Barozzi, M. / Pederzoli, S. / Vanzetti, L. / Anderle, M.

Boron ultra low energy SIMS depth profiling improved by rotating stage

Bersani, M. / Giubertoni, D. / Iacob, E. / Barozzi, M. / Pederzoli, S. / Vanzetti, L. / Anderle, M.

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Check availability in my library

Order at Subito €

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Document information

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Document information

Title:

Boron ultra low energy SIMS depth profiling improved by rotating stage

Contributors:

Bersani, M. (author) / Giubertoni, D. (author) / Iacob, E. (author) / Barozzi, M. (author) / Pederzoli, S. (author) / Vanzetti, L. (author) / Anderle, M. (author)

Published in:

APPLIED SURFACE SCIENCE ; 252 ; 7315-7317

Publication date:

2006-01-01

Size:

3 pages

ISSN:

0169-4332

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 621.35

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