Optical emission spectroscopy during fabrication of indium-tin-oxynitride films by RF-sputtering: Fid-Bau Portal

Optical emission spectroscopy during fabrication of indium-tin-oxynitride films by RF-sputtering

Koufaki, M. / Sifakis, M. / Iliopoulos, E. / Pelekanos, N. / Modreanu, M. / Cimalla, V. / Ecke, G. / Aperathitis, E.

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Optical emission spectroscopy during fabrication of indium-tin-oxynitride films by RF-sputtering

Koufaki, M. / Sifakis, M. / Iliopoulos, E. / Pelekanos, N. / Modreanu, M. / Cimalla, V. / Ecke, G. / Aperathitis, E.

Optical emission spectroscopy during fabrication of indium-tin-oxynitride films by RF-sputtering

Koufaki, M. / Sifakis, M. / Iliopoulos, E. / Pelekanos, N. / Modreanu, M. / Cimalla, V. / Ecke, G. / Aperathitis, E.

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Title:

Optical emission spectroscopy during fabrication of indium-tin-oxynitride films by RF-sputtering

Contributors:

Koufaki, M. (author) / Sifakis, M. (author) / Iliopoulos, E. (author) / Pelekanos, N. (author) / Modreanu, M. (author) / Cimalla, V. (author) / Ecke, G. (author) / Aperathitis, E. (author)

Published in:

APPLIED SURFACE SCIENCE ; 253 ; 405-408

Publication date:

2006-01-01

Size:

4 pages

ISSN:

0169-4332

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 621.35

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