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    Optical emission spectroscopy during fabrication of indium-tin-oxynitride films by RF-sputtering

    New search for: Koufaki, M.
    New search for: Sifakis, M.
    New search for: Iliopoulos, E.
    New search for: Pelekanos, N.
    New search for: Modreanu, M.
    New search for: Cimalla, V.
    New search for: Ecke, G.
    New search for: Aperathitis, E.

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    Optical emission spectroscopy during fabrication of indium-tin-oxynitride films by RF-sputtering

    New search for: Koufaki, M.
    New search for: Sifakis, M.
    New search for: Iliopoulos, E.
    New search for: Pelekanos, N.
    New search for: Modreanu, M.
    New search for: Cimalla, V.
    New search for: Ecke, G.
    New search for: Aperathitis, E.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Optical emission spectroscopy during fabrication of indium-tin-oxynitride films by RF-sputtering

    New search for: Koufaki, M.
    New search for: Sifakis, M.
    New search for: Iliopoulos, E.
    New search for: Pelekanos, N.
    New search for: Modreanu, M.
    New search for: Cimalla, V.
    New search for: Ecke, G.
    New search for: Aperathitis, E.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Page navigation

    Document information
    Similar titles

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    Document information
    Title:

    Optical emission spectroscopy during fabrication of indium-tin-oxynitride films by RF-sputtering

    Contributors:

    Koufaki, M. (author) / Sifakis, M. (author) / Iliopoulos, E. (author) / Pelekanos, N. (author) / Modreanu, M. (author) / Cimalla, V. (author) / Ecke, G. (author) / Aperathitis, E. (author)

    Published in:

    APPLIED SURFACE SCIENCE ; 253 ; 405-408

    Publication date:

    2006-01-01

    Size:

    4 pages

    ISSN:

    0169-4332

    Type of media:

    Article (Journal)

    Type of material:

    Print

    Language:

    English

    Classification:

    DDC:  621.35

    © Metadata Copyright the British Library Board and other contributors. All rights reserved.

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