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A platform for research: civil engineering, architecture and urbanism
Effect of Reactive-Ion Etching on Thermal Oxide Properties on 4H-SiC
Effect of Reactive-Ion Etching on Thermal Oxide Properties on 4H-SiC
Effect of Reactive-Ion Etching on Thermal Oxide Properties on 4H-SiC
Matocha, K. S. (author) / Cowen, C. S. (author) / Beaupre, R. (author) / Tucker, J. B. (author) / Devaty, R. P. / Larkin, D. J. / Saddow, S. E.
2006-01-01
4 pages
Article (Journal)
English
DDC:
620.11
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