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A Comparison of Dry and Underwater Laser Micromachining of Silicon Substrates

Tangwarodomnukun, V. / Wang, J. / Mathew, P.

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A Comparison of Dry and Underwater Laser Micromachining of Silicon Substrates

Tangwarodomnukun, V. / Wang, J. / Mathew, P.

A Comparison of Dry and Underwater Laser Micromachining of Silicon Substrates

Tangwarodomnukun, V. / Wang, J. / Mathew, P.

Access

Access via TIB

Check availability in my library

Order at Subito €

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Document information

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Document information

Title:

A Comparison of Dry and Underwater Laser Micromachining of Silicon Substrates

Contributors:

Tangwarodomnukun, V. (author) / Wang, J. (author) / Mathew, P. (author) / Wang, J. / Mathew, P. / Li, X. / Huang, C. / Zhu, H.

Published in:

Advances in Materials Processing IX ; 693-698

KEY ENGINEERING MATERIALS ; 443

Publication date:

2010-01-01

Size:

6 pages

ISSN:

1013-9826

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 620.11

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