Homoepitaxial Growth and Characterization of 4H-SiC Epilayers by Low-Pressure Hot-Wall Chemical Vapor Deposition: Fid-Bau Portal

Homoepitaxial Growth and Characterization of 4H-SiC Epilayers by Low-Pressure Hot-Wall Chemical Vapor Deposition

Sun, G. S. / Ning, J. / Gong, Q. C. / Gao, X. / Wang, L. / Liu, X. F. / Zeng, Y. P. / Li, J. M.

Access

Access via TIB

Check availability in my library

Order at Subito €

Page navigation

Document information

Similar titles

Export, share and cite

Homoepitaxial Growth and Characterization of 4H-SiC Epilayers by Low-Pressure Hot-Wall Chemical Vapor Deposition

Sun, G. S. / Ning, J. / Gong, Q. C. / Gao, X. / Wang, L. / Liu, X. F. / Zeng, Y. P. / Li, J. M.

Homoepitaxial Growth and Characterization of 4H-SiC Epilayers by Low-Pressure Hot-Wall Chemical Vapor Deposition

Sun, G. S. / Ning, J. / Gong, Q. C. / Gao, X. / Wang, L. / Liu, X. F. / Zeng, Y. P. / Li, J. M.

Access

Access via TIB

Check availability in my library

Order at Subito €

Page navigation

Document information

Similar titles

Export, share and cite

Document information

Title:

Homoepitaxial Growth and Characterization of 4H-SiC Epilayers by Low-Pressure Hot-Wall Chemical Vapor Deposition

Contributors:

Sun, G. S. (author) / Ning, J. (author) / Gong, Q. C. (author) / Gao, X. (author) / Wang, L. (author) / Liu, X. F. (author) / Zeng, Y. P. (author) / Li, J. M. (author) / Devaty, R. P. / Larkin, D. J.

Published in:

Silicon Carbide and Related Materials - 2005 ; 191-194

MATERIALS SCIENCE FORUM ; 527/529

Publication date:

2006-01-01

Size:

4 pages

ISSN:

0255-5476

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 620.11

Sledziewski, T. / Beljakowa, S. / Alassaad, K. et al. | British Library Online Contents | 2014

Homoepitaxial Growth of 4H-SiC on Trenched Substrates by Chemical Vapor Deposition

Chen, Y. / Kimoto, T. / Takeuchi, Y. et al. | British Library Online Contents | 2004

Homoepitaxial diamond chemical vapor deposition for ultra-light doping

Teraji, T. / Isoya, J. / Watanabe, K. et al. | British Library Online Contents | 2017

Thermal stability of InN epilayers grown by high pressure chemical vapor deposition

Acharya, A. R. / Gamage, S. / Senevirathna, M. K. et al. | British Library Online Contents | 2013

Homoepitaxial (111) diamond grown by temperature-controlled chemical vapor deposition

Nishitani-Gamo, M. / Sakaguchi, I. / Takami, T. et al. | British Library Online Contents | 1999