Evolution of Basal Plane Dislocations during 4H-SiC Epitaxial Growth: Fid-Bau Portal

Evolution of Basal Plane Dislocations during 4H-SiC Epitaxial Growth

Stahlbush, R.E. / Van Mil, B.L. / Liu, K.X. / Lew, K.K. / Ward, R.L.M. / Gaskill, D.K. / Eddy, C.R. / Zhang, X. / Skowronski, M.

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Evolution of Basal Plane Dislocations during 4H-SiC Epitaxial Growth

Stahlbush, R.E. / Van Mil, B.L. / Liu, K.X. / Lew, K.K. / Ward, R.L.M. / Gaskill, D.K. / Eddy, C.R. / Zhang, X. / Skowronski, M.

Evolution of Basal Plane Dislocations during 4H-SiC Epitaxial Growth

Stahlbush, R.E. / Van Mil, B.L. / Liu, K.X. / Lew, K.K. / Ward, R.L.M. / Gaskill, D.K. / Eddy, C.R. / Zhang, X. / Skowronski, M.

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Title:

Evolution of Basal Plane Dislocations during 4H-SiC Epitaxial Growth

Contributors:

Stahlbush, R.E. (author) / Van Mil, B.L. (author) / Liu, K.X. (author) / Lew, K.K. (author) / Ward, R.L.M. (author) / Gaskill, D.K. (author) / Eddy, C.R. (author) / Zhang, X. (author) / Skowronski, M. (author)

Published in:

MATERIALS SCIENCE FORUM ; 600/603 ; 317-320

Publication date:

2009-01-01

Size:

4 pages

ISSN:

0255-5476

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 620.11

Camarda, M. / La Magna, A. / Canino, A. et al. | British Library Online Contents | 2010

Turning of Basal Plane Dislocations during Epitaxial Growth on 4^o Off-Axis 4H-SiC

Myers-Ward, R.L. / VanMil, B.L. / Stahlbush, R.E. et al. | British Library Online Contents | 2009

Bending of Basal-Plane Dislocations in VPE Grown 4H-SiC Epitaxial Layers

Ha, S. / Mieszkowski, P. / Rowland, L. B. et al. | British Library Online Contents | 2002

Conversion of Basal Plane Dislocations to Threading Edge Dislocations in Growth of Epitaxial Layers on 4H-SiC Substrates with a Vicinal Off-Angle

Masumoto, K. / Ito, S. / Goto, H. et al. | British Library Online Contents | 2014

Why are Only Some Basal Plane Dislocations Converted to Threading Edge Dislocations during SiC Epitaxy?

Zhang, Z. H. / Shrivastava, A. / Sudarshan, T. S. | British Library Online Contents | 2006