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Bending of Basal-Plane Dislocations in VPE Grown 4H-SiC Epitaxial Layers
Bending of Basal-Plane Dislocations in VPE Grown 4H-SiC Epitaxial Layers
Bending of Basal-Plane Dislocations in VPE Grown 4H-SiC Epitaxial Layers
Ha, S. (author) / Mieszkowski, P. (author) / Rowland, L. B. (author) / Skowronski, M. (author)
MATERIALS SCIENCE FORUM ; 389/393 ; 231-234
2002-01-01
4 pages
Article (Journal)
English
DDC:
620.11
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