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Oscillation Loop for a Resonant Type MEMS Accelerometer and Its Performance under Noisy Condition
Oscillation Loop for a Resonant Type MEMS Accelerometer and Its Performance under Noisy Condition
Oscillation Loop for a Resonant Type MEMS Accelerometer and Its Performance under Noisy Condition
Hyun, C. (author) / Lee, J. G. (author) / Kang, T. S. (author) / Lee, S.-B. / Kim, Y.-J.
Experimental Mechanics in Nano and Biotechnology ; 1495-1498
KEY ENGINEERING MATERIALS ; 326/328
2006-01-01
4 pages
Article (Journal)
English
DDC:
620.11
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