Closed-Loop Control of a SOI-MEMS Resonant Accelerometer with Electromagnetic Excitation: Fid-Bau Portal

Closed-Loop Control of a SOI-MEMS Resonant Accelerometer with Electromagnetic Excitation

Shang, Y.L. / Wang, J.B. / Chen, D.Y. / Shi, Q. / Li, G.B.

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Closed-Loop Control of a SOI-MEMS Resonant Accelerometer with Electromagnetic Excitation

Shang, Y.L. / Wang, J.B. / Chen, D.Y. / Shi, Q. / Li, G.B.

Closed-Loop Control of a SOI-MEMS Resonant Accelerometer with Electromagnetic Excitation

Shang, Y.L. / Wang, J.B. / Chen, D.Y. / Shi, Q. / Li, G.B.

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Check availability in my library

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Document information

Title:

Closed-Loop Control of a SOI-MEMS Resonant Accelerometer with Electromagnetic Excitation

Contributors:

Shang, Y.L. (author) / Wang, J.B. (author) / Chen, D.Y. (author) / Shi, Q. (author) / Li, G.B. (author) / Wang, X.

Published in:

Micro-Nano Technology XIII Selected, peer reviewed papers from the 13th Annual Conference of Chinese Society of Micro-Nano Technology, September 28-30, 2011, Changchow, China ; 211-215

KEY ENGINEERING MATERIALS ; 503

Publication date:

2012-01-01

Size:

5 pages

ISSN:

1013-9826

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 620.11

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