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Laser annealing for n+/p junction formation in germanium

Tsouroutas, P. / Tsoukalas, D. / Florakis, A. / Zergioti, I. / Serafetinides, A. A. / Cherkashin, N. / Marty, B. / Claverie, A.

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Laser annealing for n+/p junction formation in germanium

Tsouroutas, P. / Tsoukalas, D. / Florakis, A. / Zergioti, I. / Serafetinides, A. A. / Cherkashin, N. / Marty, B. / Claverie, A.

Laser annealing for n+/p junction formation in germanium

Tsouroutas, P. / Tsoukalas, D. / Florakis, A. / Zergioti, I. / Serafetinides, A. A. / Cherkashin, N. / Marty, B. / Claverie, A.

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Title:

Laser annealing for n+/p junction formation in germanium

Contributors:

Tsouroutas, P. (author) / Tsoukalas, D. (author) / Florakis, A. (author) / Zergioti, I. (author) / Serafetinides, A. A. (author) / Cherkashin, N. (author) / Marty, B. (author) / Claverie, A. (author)

Published in:

MATERIALS SCIENCE IN SEMICONDUCTOR PROCESSING ; 9 ; 644-649

Publication date:

2006-01-01

Size:

6 pages

ISSN:

1369-8001

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 621.38152

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