Low-temperature oxidation of SiGe by liquid-phase deposition

Chen, Y. H. / Kung, C. Y. / Hwang, J. D. et al. | British Library Online Contents | 2008

Oxidation process of SiGe on SOI substrates

Jin, B. / Wang, X. / Chen, J. et al. | British Library Online Contents | 2006

Relaxed SiGe-on-insulator fabricated by dry oxidation of sandwiched Si/SiGe/Si structure

Di, Z. / Zhang, M. / Liu, W. et al. | British Library Online Contents | 2005

Rapid thermal oxidation of epitaxial SiGe thin films

Terrasi, A. / Scalese, S. / Adorno, R. et al. | British Library Online Contents | 2002

Strain relaxation in SiGe layer during wet oxidation process

Zhang, Y. / Cai, K. / Li, C. et al. | British Library Online Contents | 2009