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Impact of germanium surface passivation on the leakage current of shallow planar p-n junctions
Impact of germanium surface passivation on the leakage current of shallow planar p-n junctions
Impact of germanium surface passivation on the leakage current of shallow planar p-n junctions
Satta, A. (author) / Nicholas, G. (author) / Simoen, E. (author) / Houssa, M. (author) / Dimoulas, A. (author) / De Jaeger, B. (author) / Van Steenbergen, J. (author) / Meuris, M. (author)
MATERIALS SCIENCE IN SEMICONDUCTOR PROCESSING ; 9 ; 716-720
2006-01-01
5 pages
Article (Journal)
English
DDC:
621.38152
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