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Leakage current study of Si1-xCx embedded source/drain junctions

Simoen, E. / Vissouvanadin, B. / Taleb, N. / Gonzalez, M. B. / Verheyen, P. / Loo, R. / Claeys, C. / Machkaoutsan, V. / Bauer, M. / Thomas, S.

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Leakage current study of Si1-xCx embedded source/drain junctions

Simoen, E. / Vissouvanadin, B. / Taleb, N. / Gonzalez, M. B. / Verheyen, P. / Loo, R. / Claeys, C. / Machkaoutsan, V. / Bauer, M. / Thomas, S.

Leakage current study of Si1-xCx embedded source/drain junctions

Simoen, E. / Vissouvanadin, B. / Taleb, N. / Gonzalez, M. B. / Verheyen, P. / Loo, R. / Claeys, C. / Machkaoutsan, V. / Bauer, M. / Thomas, S.

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Document information

Title:

Leakage current study of Si1-xCx embedded source/drain junctions

Contributors:

Simoen, E. (author) / Vissouvanadin, B. (author) / Taleb, N. (author) / Gonzalez, M. B. (author) / Verheyen, P. (author) / Loo, R. (author) / Claeys, C. (author) / Machkaoutsan, V. (author) / Bauer, M. (author) / Thomas, S. (author)

Published in:

APPLIED SURFACE SCIENCE ; 254 ; 6140-6143

Publication date:

2008-01-01

Size:

4 pages

ISSN:

0169-4332

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 621.35

Gonzalez, M.B. / Simoen, E. / Naka, N. et al. | British Library Online Contents | 2008

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