Ion-implantation issues in the formation of shallow junctions in germanium: Fid-Bau Portal

Ion-implantation issues in the formation of shallow junctions in germanium

Simoen, E. / Satta, A. / D'Amore, A. / Janssens, T. / Clarysse, T. / Martens, K. / De Jaeger, B. / Benedetti, A. / Hoflijk, I. / Brijs, B.

Access

Access via TIB

Check availability in my library

Order at Subito €

Page navigation

Document information

Similar titles

Export, share and cite

Ion-implantation issues in the formation of shallow junctions in germanium

Simoen, E. / Satta, A. / D'Amore, A. / Janssens, T. / Clarysse, T. / Martens, K. / De Jaeger, B. / Benedetti, A. / Hoflijk, I. / Brijs, B.

Ion-implantation issues in the formation of shallow junctions in germanium

Simoen, E. / Satta, A. / D'Amore, A. / Janssens, T. / Clarysse, T. / Martens, K. / De Jaeger, B. / Benedetti, A. / Hoflijk, I. / Brijs, B.

Access

Access via TIB

Check availability in my library

Order at Subito €

Page navigation

Document information

Similar titles

Export, share and cite

Document information

Title:

Ion-implantation issues in the formation of shallow junctions in germanium

Contributors:

Simoen, E. (author) / Satta, A. (author) / D'Amore, A. (author) / Janssens, T. (author) / Clarysse, T. (author) / Martens, K. (author) / De Jaeger, B. (author) / Benedetti, A. (author) / Hoflijk, I. (author) / Brijs, B. (author)

Published in:

MATERIALS SCIENCE IN SEMICONDUCTOR PROCESSING ; 9 ; 634-639

Publication date:

2006-01-01

Size:

6 pages

ISSN:

1369-8001

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 621.38152

Pinter, I. / Abdulhadi, A. H. / Makaro, Z. et al. | British Library Online Contents | 1999

Studies of ultra shallow n+-p junctions formed by low-energy As-implantation

Girginoudi, D. / Georgoulas, N. / Thanailakis, A. et al. | British Library Online Contents | 2004

Impact of germanium surface passivation on the leakage current of shallow planar p-n junctions

Satta, A. / Nicholas, G. / Simoen, E. et al. | British Library Online Contents | 2006

Laser activation of Ultra Shallow Junctions (USJ) doped by Plasma Immersion Ion Implantation (PIII)

Vervisch, V. / Larmande, Y. / Delaporte, P. et al. | British Library Online Contents | 2009

X-ray photoelectron spectroscopy study of NiSi formation on shallow junctions

Jiang, Y. L. / Ru, G. P. / Qu, X. P. et al. | British Library Online Contents | 2009