Phosphorus diffusion in the presence of threading dislocations in strain relaxed SiGe films

Christensen, J. S. / Kuznetsov, A. Y. / Gunnaes, A. E. et al. | British Library Online Contents | 2006

Wafer bonding involving strain-relaxed SiGe

Radu, I. / Singh, R. / Reiche, M. et al. | British Library Online Contents | 2005

Boron diffusion in strained and strain-relaxed SiGe

Wang, C. C. / Sheu, Y. M. / Liu, S. et al. | British Library Online Contents | 2005

Growth and characterization of strain-relaxed SiGe buffer layers on Si(001) substrates with pure-edge misfit dislocations

Taoka, N. / Sakai, A. / Egawa, T. et al. | British Library Online Contents | 2005

Defect imaging of SiGe strain relaxed buffers grown by LEPECVD

Marchionna, S. / Virtuani, A. / Acciarri, M. et al. | British Library Online Contents | 2006