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    The effect of oxygen in Ru gate electrode on effective work function of Ru/HfO2 stack structure

    New search for: Nabatame, T.
    New search for: Segawa, K.
    New search for: Kadoshima, M.
    New search for: Takaba, H.
    New search for: Iwamoto, K.
    New search for: Kimura, S.
    New search for: Nunoshige, Y.
    New search for: Satake, H.
    New search for: Ohishi, T.
    New search for: Toriumi, A.

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    The effect of oxygen in Ru gate electrode on effective work function of Ru/HfO2 stack structure

    New search for: Nabatame, T.
    New search for: Segawa, K.
    New search for: Kadoshima, M.
    New search for: Takaba, H.
    New search for: Iwamoto, K.
    New search for: Kimura, S.
    New search for: Nunoshige, Y.
    New search for: Satake, H.
    New search for: Ohishi, T.
    New search for: Toriumi, A.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    The effect of oxygen in Ru gate electrode on effective work function of Ru/HfO2 stack structure

    New search for: Nabatame, T.
    New search for: Segawa, K.
    New search for: Kadoshima, M.
    New search for: Takaba, H.
    New search for: Iwamoto, K.
    New search for: Kimura, S.
    New search for: Nunoshige, Y.
    New search for: Satake, H.
    New search for: Ohishi, T.
    New search for: Toriumi, A.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

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    Document information
    Title:

    The effect of oxygen in Ru gate electrode on effective work function of Ru/HfO2 stack structure

    Contributors:

    Nabatame, T. (author) / Segawa, K. (author) / Kadoshima, M. (author) / Takaba, H. (author) / Iwamoto, K. (author) / Kimura, S. (author) / Nunoshige, Y. (author) / Satake, H. (author) / Ohishi, T. (author) / Toriumi, A. (author)

    Published in:

    MATERIALS SCIENCE IN SEMICONDUCTOR PROCESSING ; 9 ; 975-979

    Publication date:

    2006-01-01

    Size:

    5 pages

    ISSN:

    1369-8001

    Type of media:

    Article (Journal)

    Type of material:

    Print

    Language:

    English

    Classification:

    DDC:  621.38152

    © Metadata Copyright the British Library Board and other contributors. All rights reserved.

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