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Structural, electrical and optical properties of GZO/HfO2/GZO transparent MIM capacitors
Structural, electrical and optical properties of GZO/HfO2/GZO transparent MIM capacitors
Structural, electrical and optical properties of GZO/HfO2/GZO transparent MIM capacitors
Ahn, B. D. (author) / Kim, J. H. (author) / Kang, H. S. (author) / Lee, C. H. (author) / Oh, S. H. (author) / Kim, G. H. (author) / Li, D. H. (author) / Lee, S. Y. (author)
MATERIALS SCIENCE IN SEMICONDUCTOR PROCESSING ; 9 ; 1119-1124
2006-01-01
6 pages
Article (Journal)
English
DDC:
621.38152
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