Applications of Polishing Technology Using Polymer Particles to Silicon Wafers and Quartz Crystal Wafers: Fid-Bau Portal

Applications of Polishing Technology Using Polymer Particles to Silicon Wafers and Quartz Crystal Wafers

Lu, Y. S. / Tani, Y. / Soutome, K. / Kamimura, Y.

Access

Access via TIB

Check availability in my library

Order at Subito €

Page navigation

Document information

Similar titles

Export, share and cite

Applications of Polishing Technology Using Polymer Particles to Silicon Wafers and Quartz Crystal Wafers

Lu, Y. S. / Tani, Y. / Soutome, K. / Kamimura, Y.

Applications of Polishing Technology Using Polymer Particles to Silicon Wafers and Quartz Crystal Wafers

Lu, Y. S. / Tani, Y. / Soutome, K. / Kamimura, Y.

Access

Access via TIB

Check availability in my library

Order at Subito €

Page navigation

Document information

Similar titles

Export, share and cite

Document information

Title:

Applications of Polishing Technology Using Polymer Particles to Silicon Wafers and Quartz Crystal Wafers

Contributors:

Lu, Y. S. (author) / Tani, Y. (author) / Soutome, K. (author) / Kamimura, Y. (author) / Dong, S. / Yao, Y.

Published in:

Progress of Precision Engineering and Nano Technology Selected Papers from Proceeding of the First International Conference on Precision Engineering and Micro/Nano Technology in Asia November 12-14, 2005, Shenzhen, China ; 263-268

KEY ENGINEERING MATERIALS ; 339

Publication date:

2007-01-01

Size:

6 pages

ISSN:

1013-9826

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 620.11

Feng, H.B. / Chen, Y.Q. / Zhang, L.C. | British Library Online Contents | 2013

Comparison of high temperature annealed Czochralski silicon wafers and epitaxial wafers

Graef, D. / Lambert, U. / Brohl, M. et al. | British Library Online Contents | 1996

New Cutting Technology of Solar-cell Silicon Wafers

Bi, Y. / Liu, Z.-d. / Qiu, M.-b. et al. | British Library Online Contents | 2010

Measurements of Polishing-Induced Residual Damages in Silicon Wafers Using Noncontact Photoconductivity Amplitude Technique

Ogita, Y. / Nakano, M. / Masumura, H. | British Library Online Contents | 1995

Damage mechanisms during lapping and mechanical polishing CdZnTe wafers

Li, Y. / Kang, R. / Gao, H. et al. | British Library Online Contents | 2010