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    Study on oxidization of Ru and its application as electrode of PZT capacitor for FeRAM

    New search for: Jia, Z.
    New search for: Ren, T. l.
    New search for: Liu, T. z.
    New search for: Hu, H.
    New search for: Zhang, Z. g.
    New search for: Xie, D.
    New search for: Liu, L. t.

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    Study on oxidization of Ru and its application as electrode of PZT capacitor for FeRAM

    New search for: Jia, Z.
    New search for: Ren, T. l.
    New search for: Liu, T. z.
    New search for: Hu, H.
    New search for: Zhang, Z. g.
    New search for: Xie, D.
    New search for: Liu, L. t.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Study on oxidization of Ru and its application as electrode of PZT capacitor for FeRAM

    New search for: Jia, Z.
    New search for: Ren, T. l.
    New search for: Liu, T. z.
    New search for: Hu, H.
    New search for: Zhang, Z. g.
    New search for: Xie, D.
    New search for: Liu, L. t.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Page navigation

    Document information
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    Document information
    Title:

    Study on oxidization of Ru and its application as electrode of PZT capacitor for FeRAM

    Contributors:

    Jia, Z. (author) / Ren, T. l. (author) / Liu, T. z. (author) / Hu, H. (author) / Zhang, Z. g. (author) / Xie, D. (author) / Liu, L. t. (author)

    Published in:

    MATERIALS SCIENCE AND ENGINEERING B -LAUSANNE- ; 138 ; 219-223

    Publication date:

    2007-01-01

    Size:

    5 pages

    ISSN:

    0921-5107

    Type of media:

    Article (Journal)

    Type of material:

    Print

    Language:

    English

    Classification:

    DDC:  620.11

    © Metadata Copyright the British Library Board and other contributors. All rights reserved.

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