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    Effect of substrate bias voltage on corrosion of TiN/Ti multilayers deposited by magnetron sputtering

    New search for: Flores, M.
    New search for: Huerta, L.
    New search for: Escamilla, R.
    New search for: Andrade, E.
    New search for: Muhl, S.

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    Effect of substrate bias voltage on corrosion of TiN/Ti multilayers deposited by magnetron sputtering

    New search for: Flores, M.
    New search for: Huerta, L.
    New search for: Escamilla, R.
    New search for: Andrade, E.
    New search for: Muhl, S.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Effect of substrate bias voltage on corrosion of TiN/Ti multilayers deposited by magnetron sputtering

    New search for: Flores, M.
    New search for: Huerta, L.
    New search for: Escamilla, R.
    New search for: Andrade, E.
    New search for: Muhl, S.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Page navigation

    Document information
    Similar titles

    Export, share and cite

    Document information
    Title:

    Effect of substrate bias voltage on corrosion of TiN/Ti multilayers deposited by magnetron sputtering

    Contributors:

    Flores, M. (author) / Huerta, L. (author) / Escamilla, R. (author) / Andrade, E. (author) / Muhl, S. (author)

    Published in:

    APPLIED SURFACE SCIENCE ; 253 ; 7192-7196

    Publication date:

    2007-01-01

    Size:

    5 pages

    ISSN:

    0169-4332

    Type of media:

    Article (Journal)

    Type of material:

    Print

    Language:

    English

    Classification:

    DDC:  621.35

    © Metadata Copyright the British Library Board and other contributors. All rights reserved.

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