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Analysis of excimer laser annealing of amorphous SiGe on La2O3//Si structures
Analysis of excimer laser annealing of amorphous SiGe on La2O3//Si structures
Analysis of excimer laser annealing of amorphous SiGe on La2O3//Si structures
Fornarini, L. (author) / Conde, J. C. (author) / Gonzalez, P. (author) / Leon, B. (author) / Martelli, S. (author)
APPLIED SURFACE SCIENCE ; 253 ; 7957-7963
2007-01-01
7 pages
Article (Journal)
English
DDC:
621.35
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