Growth and Study of Thick 3C-SiC Epitaxial Layers Produced by Epitaxy on 6H-SiC Substrates: Fid-Bau Portal

Growth and Study of Thick 3C-SiC Epitaxial Layers Produced by Epitaxy on 6H-SiC Substrates

Lebedev, A. A. / Zelenin, V. V. / Abramov, P. L. / Bogdanova, E. V. / Lebedev, S. P. / Nel son, D. K. / Razbirin, B. S. / Scheglov, M. P. / Tregubova, A. S. / Syvajarvi, M.

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Growth and Study of Thick 3C-SiC Epitaxial Layers Produced by Epitaxy on 6H-SiC Substrates

Lebedev, A. A. / Zelenin, V. V. / Abramov, P. L. / Bogdanova, E. V. / Lebedev, S. P. / Nel son, D. K. / Razbirin, B. S. / Scheglov, M. P. / Tregubova, A. S. / Syvajarvi, M.

Growth and Study of Thick 3C-SiC Epitaxial Layers Produced by Epitaxy on 6H-SiC Substrates

Lebedev, A. A. / Zelenin, V. V. / Abramov, P. L. / Bogdanova, E. V. / Lebedev, S. P. / Nel son, D. K. / Razbirin, B. S. / Scheglov, M. P. / Tregubova, A. S. / Syvajarvi, M.

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Title:

Growth and Study of Thick 3C-SiC Epitaxial Layers Produced by Epitaxy on 6H-SiC Substrates

Contributors:

Lebedev, A. A. (author) / Zelenin, V. V. (author) / Abramov, P. L. (author) / Bogdanova, E. V. (author) / Lebedev, S. P. (author) / Nel son, D. K. (author) / Razbirin, B. S. (author) / Scheglov, M. P. (author) / Tregubova, A. S. (author) / Syvajarvi, M. (author)

Published in:

Silicon Carbide and Related Materials 2006 ; 175-178

MATERIALS SCIENCE FORUM ; 556/557

Publication date:

2007-01-01

Size:

4 pages

ISSN:

0255-5476

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 620.11

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