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High Growth Rate Epitaxy of Thick 4H-SiC Layers

Syvajarvi, M. / Yakimova, R. / Jacobsson, H. / Linnarsson, M. K. / Henry, A. / Janzen, E.

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High Growth Rate Epitaxy of Thick 4H-SiC Layers

Syvajarvi, M. / Yakimova, R. / Jacobsson, H. / Linnarsson, M. K. / Henry, A. / Janzen, E.

High Growth Rate Epitaxy of Thick 4H-SiC Layers

Syvajarvi, M. / Yakimova, R. / Jacobsson, H. / Linnarsson, M. K. / Henry, A. / Janzen, E.

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Document information

Title:

High Growth Rate Epitaxy of Thick 4H-SiC Layers

Contributors:

Syvajarvi, M. (author) / Yakimova, R. (author) / Jacobsson, H. (author) / Linnarsson, M. K. (author) / Henry, A. (author) / Janzen, E. (author)

Published in:

MATERIALS SCIENCE FORUM ; 338/342 ; 165-168

Publication date:

2000-01-01

Size:

4 pages

ISSN:

0255-5476

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 620.11

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