Chemical Etching Behavior of Single-crystal Silicon Slice: Fid-Bau Portal

Chemical Etching Behavior of Single-crystal Silicon Slice

Wen, J.-b. / Fan, L.-m. / Zhao, S.-l. / Zhu, Y.-m.

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Chemical Etching Behavior of Single-crystal Silicon Slice

Wen, J.-b. / Fan, L.-m. / Zhao, S.-l. / Zhu, Y.-m.

Chemical Etching Behavior of Single-crystal Silicon Slice

Wen, J.-b. / Fan, L.-m. / Zhao, S.-l. / Zhu, Y.-m.

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Access via TIB

Check availability in my library

Order at Subito €

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Document information

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Document information

Title:

Chemical Etching Behavior of Single-crystal Silicon Slice

Contributors:

Wen, J.-b. (author) / Fan, L.-m. (author) / Zhao, S.-l. (author) / Zhu, Y.-m. (author)

Published in:

CORROSION SCIENCE AND PROTECTION TECHNOLOGY ; 19 ; 269-271

Publication date:

2007-01-01

Size:

3 pages

ISSN:

1002-6495

Type of media:

Article (Journal)

Type of material:

Language:

Unknown

Classification:

DDC: 620.11223

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