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    Measurement and characterization of a nano-scale multiple-step height sample using a stylus profiler

    New search for: Li, C.
    New search for: Yang, S.
    New search for: Wang, Y.
    New search for: Wang, C.
    New search for: Ren, W.
    New search for: Jiang, Z.

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    Measurement and characterization of a nano-scale multiple-step height sample using a stylus profiler

    New search for: Li, C.
    New search for: Yang, S.
    New search for: Wang, Y.
    New search for: Wang, C.
    New search for: Ren, W.
    New search for: Jiang, Z.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Measurement and characterization of a nano-scale multiple-step height sample using a stylus profiler

    New search for: Li, C.
    New search for: Yang, S.
    New search for: Wang, Y.
    New search for: Wang, C.
    New search for: Ren, W.
    New search for: Jiang, Z.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

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    Document information
    Similar titles

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    Document information
    Title:

    Measurement and characterization of a nano-scale multiple-step height sample using a stylus profiler

    Contributors:

    Li, C. (author) / Yang, S. (author) / Wang, Y. (author) / Wang, C. (author) / Ren, W. (author) / Jiang, Z. (author)

    Published in:

    APPLIED SURFACE SCIENCE ; 387 ; 732-735

    Publication date:

    2016-01-01

    Size:

    4 pages

    ISSN:

    0169-4332

    Type of media:

    Article (Journal)

    Type of material:

    Print

    Language:

    English

    Classification:

    DDC:  621.35

    © Metadata Copyright the British Library Board and other contributors. All rights reserved.

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