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    Measurement and characterization of a nano-scale multiple-step height sample using a stylus profiler

    New search for: Li, Changsheng
    New search for: Yang, Shuming
    New search for: Wang, Yiming
    New search for: Wang, Chenying
    New search for: Ren, Wei
    New search for: Jiang, Zhuangde

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    Measurement and characterization of a nano-scale multiple-step height sample using a stylus profiler

    New search for: Li, Changsheng
    New search for: Yang, Shuming
    New search for: Wang, Yiming
    New search for: Wang, Chenying
    New search for: Ren, Wei
    New search for: Jiang, Zhuangde

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Measurement and characterization of a nano-scale multiple-step height sample using a stylus profiler

    New search for: Li, Changsheng
    New search for: Yang, Shuming
    New search for: Wang, Yiming
    New search for: Wang, Chenying
    New search for: Ren, Wei
    New search for: Jiang, Zhuangde

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

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    Document information
    Similar titles

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    Document information
    Title:

    Measurement and characterization of a nano-scale multiple-step height sample using a stylus profiler

    Contributors:

    Li, Changsheng (author) / Yang, Shuming (author) / Wang, Yiming (author) / Wang, Chenying (author) / Ren, Wei (author) / Jiang, Zhuangde (author)

    Published in:

    Applied surface science ; 387 ; 732-735

    Publication date:

    2016-01-01

    Size:

    4 pages

    ISSN:

    0169-4332

    Type of media:

    Article (Journal)

    Type of material:

    Print

    Language:

    English

    Classification:

    DDC:  620.44

    © Metadata Copyright the British Library Board and other contributors. All rights reserved.

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