Deposition of aluminum nitride thin film on Si(111) by KrF excimer laser and its characterizations: Fid-Bau Portal

Deposition of aluminum nitride thin film on Si(111) by KrF excimer laser and its characterizations

Shih, M. C. / Liang, C. W. / Chaing, P. J.

Access

Access via TIB

Check availability in my library

Order at Subito €

Page navigation

Document information

Similar titles

Export, share and cite

Deposition of aluminum nitride thin film on Si(111) by KrF excimer laser and its characterizations

Shih, M. C. / Liang, C. W. / Chaing, P. J.

Deposition of aluminum nitride thin film on Si(111) by KrF excimer laser and its characterizations

Shih, M. C. / Liang, C. W. / Chaing, P. J.

Access

Access via TIB

Check availability in my library

Order at Subito €

Page navigation

Document information

Similar titles

Export, share and cite

Document information

Title:

Deposition of aluminum nitride thin film on Si(111) by KrF excimer laser and its characterizations

Contributors:

Shih, M. C. (author) / Liang, C. W. (author) / Chaing, P. J. (author)

Published in:

APPLIED SURFACE SCIENCE ; 254 ; 2211-2215

Publication date:

2008-01-01

Size:

5 pages

ISSN:

0169-4332

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 621.35

D`Anna, E. / Di Cristoforo, A. / Fernandez, M. et al. | British Library Online Contents | 2002

Excimer laser ablation of aluminum nitride

Lumpp, J. K. / Allen, S. D. | British Library Online Contents | 1997

Excimer laser reactive ablation deposition of silicon nitride films

D'Anna, E. / Leggieri, G. / Luches, A. et al. | British Library Online Contents | 1995

Pulsed laser deposition of aluminum nitride and gallium nitride thin films

Sudhir, G. S. / Fujii, H. / Wong, W. S. et al. | British Library Online Contents | 1998

Titanium nitride thin film deposition by laser CVD

Reisse, G. / Ebert, R. | British Library Online Contents | 1996