Advantage of the structure and the electrical properties of epitaxial ultra-thin zirconia gate dielectrics: Fid-Bau Portal

Advantage of the structure and the electrical properties of epitaxial ultra-thin zirconia gate dielectrics

Kiguchi, T. / Wakiya, N. / Tanaka, J. / Shinozaki, K.

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Advantage of the structure and the electrical properties of epitaxial ultra-thin zirconia gate dielectrics

Kiguchi, T. / Wakiya, N. / Tanaka, J. / Shinozaki, K.

Advantage of the structure and the electrical properties of epitaxial ultra-thin zirconia gate dielectrics

Kiguchi, T. / Wakiya, N. / Tanaka, J. / Shinozaki, K.

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Document information

Title:

Advantage of the structure and the electrical properties of epitaxial ultra-thin zirconia gate dielectrics

Contributors:

Kiguchi, T. (author) / Wakiya, N. (author) / Tanaka, J. (author) / Shinozaki, K. (author)

Published in:

MATERIALS SCIENCE AND ENGINEERING B -LAUSANNE- ; 148 ; 30-34

Publication date:

2008-01-01

Size:

5 pages

ISSN:

0921-5107

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 620.11

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