Wafer Level Thin Film Encapsulation for RF MEMS: Fid-Bau Portal

Wafer Level Thin Film Encapsulation for RF MEMS

Gillot, C. / Pornin, J.L. / Parat, G. / Jacquet, F. / Lagoutte, E. / Sillon, N. / Poupon, G. / Ancey, P.

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Wafer Level Thin Film Encapsulation for RF MEMS

Gillot, C. / Pornin, J.L. / Parat, G. / Jacquet, F. / Lagoutte, E. / Sillon, N. / Poupon, G. / Ancey, P.

Wafer Level Thin Film Encapsulation for RF MEMS

Gillot, C. / Pornin, J.L. / Parat, G. / Jacquet, F. / Lagoutte, E. / Sillon, N. / Poupon, G. / Ancey, P.

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Document information

Title:

Wafer Level Thin Film Encapsulation for RF MEMS

Contributors:

Gillot, C. (author) / Pornin, J.L. (author) / Parat, G. (author) / Jacquet, F. (author) / Lagoutte, E. (author) / Sillon, N. (author) / Poupon, G. (author) / Ancey, P. (author)

Published in:

ADVANCING MICROELECTRONICS ; 35 ; 14-19

Publication date:

2008-01-01

Size:

6 pages

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 621.381

Markunas, B. | British Library Online Contents | 2002

Parton, E. / Tilmans, H. | British Library Online Contents | 2002

Baert, K. / De Moor, P. / Tilmans, H. et al. | British Library Online Contents | 2004

Gooch, R. / Schimert, T. | British Library Online Contents | 2003

Choa, S. H. | British Library Online Contents | 2006