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Deposition and characterization of Si-rich silicon oxide films using HMDS for integrated photonics

Tomar, V. K. / Gautam, D. K.

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Deposition and characterization of Si-rich silicon oxide films using HMDS for integrated photonics

Tomar, V. K. / Gautam, D. K.

Deposition and characterization of Si-rich silicon oxide films using HMDS for integrated photonics

Tomar, V. K. / Gautam, D. K.

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Check availability in my library

Order at Subito €

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Document information

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Document information

Title:

Deposition and characterization of Si-rich silicon oxide films using HMDS for integrated photonics

Contributors:

Tomar, V. K. (author) / Gautam, D. K. (author)

Published in:

MATERIALS SCIENCE IN SEMICONDUCTOR PROCESSING ; 10 ; 200-205

Publication date:

2007-01-01

Size:

6 pages

ISSN:

1369-8001

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 621.38152

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