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Recombination activity of nickel in nitrogen-doped Czochralski silicon treated by rapid thermal processing
Recombination activity of nickel in nitrogen-doped Czochralski silicon treated by rapid thermal processing
Recombination activity of nickel in nitrogen-doped Czochralski silicon treated by rapid thermal processing
MATERIALS SCIENCE IN SEMICONDUCTOR PROCESSING ; 10 ; 222-226
2007-01-01
5 pages
Article (Journal)
English
DDC:
621.38152
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