Nitrogen-doped Czochralski silicon treated in rapid thermal process

Yang, D. / Li, M. / Cui, C. et al. | British Library Online Contents | 2006

Recombination activity of nickel in Czochralski silicon during rapid thermal process

Wang, W. / Xi, Z. / Yang, D. et al. | British Library Online Contents | 2006

Internal gettering for germanium-doped Czochralski silicon: Treated by rapid-thermal-anneal based processing simulation

Chen, J. / Yang, D. / Ma, X. et al. | British Library Online Contents | 2009

Effect of Rapid Thermal Processing on Oxygen Precipitation in Czochralski Silicon Subjected to Simulating CMOS Thermal Processing

Ma, Q. / Yang, D.-r. / Ma, X.-y. et al. | British Library Online Contents | 2006

Precipitate recognition and recombination strength in annealed Czochralski silicon wafers

Stemmer, M. / Veve, C. / Gay, N. et al. | British Library Online Contents | 1995