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Thermal annealing of amorphous Ti-Si-O thin films

Hodroj, A. / Chaix-Pluchery, O. / Audier, M. / Gottlieb, U. / Deschanvres, J.-L.

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Thermal annealing of amorphous Ti-Si-O thin films

Hodroj, A. / Chaix-Pluchery, O. / Audier, M. / Gottlieb, U. / Deschanvres, J.-L.

Thermal annealing of amorphous Ti-Si-O thin films

Hodroj, A. / Chaix-Pluchery, O. / Audier, M. / Gottlieb, U. / Deschanvres, J.-L.

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Check availability in my library

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Document information

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Document information

Title:

Thermal annealing of amorphous Ti-Si-O thin films

Contributors:

Hodroj, A. (author) / Chaix-Pluchery, O. (author) / Audier, M. (author) / Gottlieb, U. (author) / Deschanvres, J.-L. (author)

Published in:

JOURNAL OF MATERIALS RESEARCH -PITTSBURGH THEN WARRENDALE- ; 23 ; 755-759

Publication date:

2008-01-01

Size:

5 pages

ISSN:

0884-2914

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 620.11

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