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    Characterization of Zr-Si-N films deposited by cathodic vacuum arc with different N2/SiH4 flow rates

    New search for: Zhang, G. P.
    New search for: Niu, E. W.
    New search for: Wang, X. Q.
    New search for: Lv, G. H.
    New search for: Zhou, L.
    New search for: Pang, H.
    New search for: Huang, J.
    New search for: Chen, W.
    New search for: Yang, S. Z.

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    Characterization of Zr-Si-N films deposited by cathodic vacuum arc with different N2/SiH4 flow rates

    New search for: Zhang, G. P.
    New search for: Niu, E. W.
    New search for: Wang, X. Q.
    New search for: Lv, G. H.
    New search for: Zhou, L.
    New search for: Pang, H.
    New search for: Huang, J.
    New search for: Chen, W.
    New search for: Yang, S. Z.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Characterization of Zr-Si-N films deposited by cathodic vacuum arc with different N2/SiH4 flow rates

    New search for: Zhang, G. P.
    New search for: Niu, E. W.
    New search for: Wang, X. Q.
    New search for: Lv, G. H.
    New search for: Zhou, L.
    New search for: Pang, H.
    New search for: Huang, J.
    New search for: Chen, W.
    New search for: Yang, S. Z.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

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    Document information
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    Document information
    Title:

    Characterization of Zr-Si-N films deposited by cathodic vacuum arc with different N2/SiH4 flow rates

    Contributors:

    Zhang, G. P. (author) / Niu, E. W. (author) / Wang, X. Q. (author) / Lv, G. H. (author) / Zhou, L. (author) / Pang, H. (author) / Huang, J. (author) / Chen, W. (author) / Yang, S. Z. (author)

    Published in:

    APPLIED SURFACE SCIENCE ; 258 ; 3674-3678

    Publication date:

    2012-01-01

    Size:

    5 pages

    ISSN:

    0169-4332

    Type of media:

    Article (Journal)

    Type of material:

    Print

    Language:

    English

    Classification:

    DDC:  621.35

    © Metadata Copyright the British Library Board and other contributors. All rights reserved.

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