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    Atomic layer deposition of Cr2O3 thin films: Effect of crystallization on growth and properties

    New search for: Tarre, A.
    New search for: Aarik, J.
    New search for: Mandar, H.
    New search for: Niilisk, A.
    New search for: Parna, R.
    New search for: Rammula, R.
    New search for: Uustare, T.
    New search for: Rosental, A.
    New search for: Sammelselg, V.

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    Atomic layer deposition of Cr2O3 thin films: Effect of crystallization on growth and properties

    New search for: Tarre, A.
    New search for: Aarik, J.
    New search for: Mandar, H.
    New search for: Niilisk, A.
    New search for: Parna, R.
    New search for: Rammula, R.
    New search for: Uustare, T.
    New search for: Rosental, A.
    New search for: Sammelselg, V.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Atomic layer deposition of Cr2O3 thin films: Effect of crystallization on growth and properties

    New search for: Tarre, A.
    New search for: Aarik, J.
    New search for: Mandar, H.
    New search for: Niilisk, A.
    New search for: Parna, R.
    New search for: Rammula, R.
    New search for: Uustare, T.
    New search for: Rosental, A.
    New search for: Sammelselg, V.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

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    Document information
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    Document information
    Title:

    Atomic layer deposition of Cr2O3 thin films: Effect of crystallization on growth and properties

    Contributors:

    Tarre, A. (author) / Aarik, J. (author) / Mandar, H. (author) / Niilisk, A. (author) / Parna, R. (author) / Rammula, R. (author) / Uustare, T. (author) / Rosental, A. (author) / Sammelselg, V. (author)

    Published in:

    APPLIED SURFACE SCIENCE ; 254 ; 5149-5156

    Publication date:

    2008-01-01

    Size:

    8 pages

    ISSN:

    0169-4332

    Type of media:

    Article (Journal)

    Type of material:

    Print

    Language:

    English

    Classification:

    DDC:  621.35

    © Metadata Copyright the British Library Board and other contributors. All rights reserved.

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