Synthesis of ZrO2 thin films by atomic layer deposition: growth kinetics, structural and electrical properties: Fid-Bau Portal

Synthesis of ZrO2 thin films by atomic layer deposition: growth kinetics, structural and electrical properties

Cassir, M. / Goubin, F. / Bernay, C. / Vernoux, P. / Lincot, D.

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Synthesis of ZrO2 thin films by atomic layer deposition: growth kinetics, structural and electrical properties

Cassir, M. / Goubin, F. / Bernay, C. / Vernoux, P. / Lincot, D.

Synthesis of ZrO2 thin films by atomic layer deposition: growth kinetics, structural and electrical properties

Cassir, M. / Goubin, F. / Bernay, C. / Vernoux, P. / Lincot, D.

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Check availability in my library

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Document information

Title:

Synthesis of ZrO2 thin films by atomic layer deposition: growth kinetics, structural and electrical properties

Contributors:

Cassir, M. (author) / Goubin, F. (author) / Bernay, C. (author) / Vernoux, P. (author) / Lincot, D. (author)

Published in:

APPLIED SURFACE SCIENCE ; 193 ; 120-128

Publication date:

2002-01-01

Size:

9 pages

ISSN:

0169-4332

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 621.35

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