Modeling of low temperature SiGe oxidation

Mane, S. S. / Hameed, S. / Saha, A. R. et al. | British Library Online Contents | 2006

Oxidation process of SiGe on SOI substrates

Jin, B. / Wang, X. / Chen, J. et al. | British Library Online Contents | 2006

Relaxed SiGe-on-insulator fabricated by dry oxidation of sandwiched Si/SiGe/Si structure

Di, Z. / Zhang, M. / Liu, W. et al. | British Library Online Contents | 2005

Morphological evolution of self-assembled SiGe islands based on a mixed-phase pre-SiGe island layer grown by ion beam sputtering deposition

Ke, S. / Ye, S. / Yang, J. et al. | British Library Online Contents | 2015

Production-ready dry cleaning and deposition processes for low-temperature Si and SiGe epitaxy

Buschbeck, H. M. / Erhart, A. / Goeggel, Y. et al. | British Library Online Contents | 2004