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    Band bending measurement of HfO2/SiO2/Si capacitor with ultra-thin La2O3 insertion by XPS

    New search for: Kakushima, K.
    New search for: Okamoto, K.
    New search for: Adachi, M.
    New search for: Tachi, K.
    New search for: Song, J.
    New search for: Sato, S.
    New search for: Kawanago, T.
    New search for: Ahmet, P.
    New search for: Tsutsui, K.
    New search for: Sugii, N.

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    Band bending measurement of HfO2/SiO2/Si capacitor with ultra-thin La2O3 insertion by XPS

    New search for: Kakushima, K.
    New search for: Okamoto, K.
    New search for: Adachi, M.
    New search for: Tachi, K.
    New search for: Song, J.
    New search for: Sato, S.
    New search for: Kawanago, T.
    New search for: Ahmet, P.
    New search for: Tsutsui, K.
    New search for: Sugii, N.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Band bending measurement of HfO2/SiO2/Si capacitor with ultra-thin La2O3 insertion by XPS

    New search for: Kakushima, K.
    New search for: Okamoto, K.
    New search for: Adachi, M.
    New search for: Tachi, K.
    New search for: Song, J.
    New search for: Sato, S.
    New search for: Kawanago, T.
    New search for: Ahmet, P.
    New search for: Tsutsui, K.
    New search for: Sugii, N.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Page navigation

    Document information
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    Document information
    Title:

    Band bending measurement of HfO2/SiO2/Si capacitor with ultra-thin La2O3 insertion by XPS

    Contributors:

    Kakushima, K. (author) / Okamoto, K. (author) / Adachi, M. (author) / Tachi, K. (author) / Song, J. (author) / Sato, S. (author) / Kawanago, T. (author) / Ahmet, P. (author) / Tsutsui, K. (author) / Sugii, N. (author)

    Published in:

    APPLIED SURFACE SCIENCE ; 254 ; 6106-6108

    Publication date:

    2008-01-01

    Size:

    3 pages

    ISSN:

    0169-4332

    Type of media:

    Article (Journal)

    Type of material:

    Print

    Language:

    English

    Classification:

    DDC:  621.35

    © Metadata Copyright the British Library Board and other contributors. All rights reserved.

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