Electrical characterization and carrier transportation in Hf-silicate dielectrics using ALD gate stacks for 90nm node MOSFETs: Fid-Bau Portal

Electrical characterization and carrier transportation in Hf-silicate dielectrics using ALD gate stacks for 90nm node MOSFETs

Chen, H. W. / Chen, S. Y. / Chen, K. C. / Huang, H. S. / Liu, C. H. / Chiu, F. C. / Liu, K. W. / Lin, K. C. / Cheng, L. W. / Lin, C. T.

Access

Access via TIB

Check availability in my library

Order at Subito €

Page navigation

Document information

Similar titles

Export, share and cite

Electrical characterization and carrier transportation in Hf-silicate dielectrics using ALD gate stacks for 90nm node MOSFETs

Chen, H. W. / Chen, S. Y. / Chen, K. C. / Huang, H. S. / Liu, C. H. / Chiu, F. C. / Liu, K. W. / Lin, K. C. / Cheng, L. W. / Lin, C. T.

Electrical characterization and carrier transportation in Hf-silicate dielectrics using ALD gate stacks for 90nm node MOSFETs

Chen, H. W. / Chen, S. Y. / Chen, K. C. / Huang, H. S. / Liu, C. H. / Chiu, F. C. / Liu, K. W. / Lin, K. C. / Cheng, L. W. / Lin, C. T.

Access

Access via TIB

Check availability in my library

Order at Subito €

Page navigation

Document information

Similar titles

Export, share and cite

Document information

Title:

Electrical characterization and carrier transportation in Hf-silicate dielectrics using ALD gate stacks for 90nm node MOSFETs

Contributors:

Chen, H. W. (author) / Chen, S. Y. (author) / Chen, K. C. (author) / Huang, H. S. (author) / Liu, C. H. (author) / Chiu, F. C. (author) / Liu, K. W. (author) / Lin, K. C. (author) / Cheng, L. W. (author) / Lin, C. T. (author)

Published in:

APPLIED SURFACE SCIENCE ; 254 ; 6127-6130

Publication date:

2008-01-01

Size:

4 pages

ISSN:

0169-4332

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 621.35

Gurfinkel, M. / Borenshtein, M. / Margulis, A. et al. | British Library Online Contents | 2005

Challenges in Atomic-Scale Characterization of High-k Dielectrics and Metal Gate Electrodes for Advanced CMOS Gate Stacks

Zhu, X. / Zhu, J.-m. / Li, A. et al. | British Library Online Contents | 2009

Electrical characterization of MFeOS gate stacks for ferroelectric FETs

Kumar, A. / Rao, A. / Goswami, M. et al. | British Library Online Contents | 2013

Electrical characterization of high-k gate dielectrics on semiconductors

Ma, T. P. | British Library Online Contents | 2008

Materials Characterization of Alternative Gate Dielectrics

Busch, B. W. / Pluchery, O. / Chabal, Y. J. et al. | British Library Online Contents | 2002