Stress analysis of Si~1~-~xGe~x embedded source/drain junctions: Fid-Bau Portal

Stress analysis of Si~1~-~xGe~x embedded source/drain junctions

Gonzalez, M.B. / Simoen, E. / Naka, N. / Okuno, Y. / Eneman, G. / Hikavyy, A. / Verheyen, P. / Loo, R. / Claeys, C. / Machkaoutsan, V.

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Stress analysis of Si~1~-~xGe~x embedded source/drain junctions

Gonzalez, M.B. / Simoen, E. / Naka, N. / Okuno, Y. / Eneman, G. / Hikavyy, A. / Verheyen, P. / Loo, R. / Claeys, C. / Machkaoutsan, V.

Stress analysis of Si~1~-~xGe~x embedded source/drain junctions

Gonzalez, M.B. / Simoen, E. / Naka, N. / Okuno, Y. / Eneman, G. / Hikavyy, A. / Verheyen, P. / Loo, R. / Claeys, C. / Machkaoutsan, V.

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Title:

Stress analysis of Si~1~-~xGe~x embedded source/drain junctions

Contributors:

Gonzalez, M.B. (author) / Simoen, E. (author) / Naka, N. (author) / Okuno, Y. (author) / Eneman, G. (author) / Hikavyy, A. (author) / Verheyen, P. (author) / Loo, R. (author) / Claeys, C. (author) / Machkaoutsan, V. (author)

Published in:

MATERIALS SCIENCE IN SEMICONDUCTOR PROCESSING ; 11 ; 285-290

Publication date:

2008-01-01

Size:

6 pages

ISSN:

1369-8001

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 621.38152

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