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    Photoresist Templates for Wafer Scale Defect Free Evaporative Lithography

    New search for: Tang, X.
    New search for: O Shea, S. J.
    New search for: Vakarelski, I. U.

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    Photoresist Templates for Wafer Scale Defect Free Evaporative Lithography

    New search for: Tang, X.
    New search for: O Shea, S. J.
    New search for: Vakarelski, I. U.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Photoresist Templates for Wafer Scale Defect Free Evaporative Lithography

    New search for: Tang, X.
    New search for: O Shea, S. J.
    New search for: Vakarelski, I. U.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Page navigation

    Document information
    Similar titles

    Export, share and cite

    Document information
    Title:

    Photoresist Templates for Wafer Scale Defect Free Evaporative Lithography

    Contributors:

    Tang, X. (author) / O Shea, S. J. (author) / Vakarelski, I. U. (author)

    Published in:

    ADVANCED MATERIALS -DEERFIELD BEACH THEN WEINHEIM- ; 22 ; 5150-5153

    Publication date:

    2010-01-01

    Size:

    4 pages

    ISSN:

    0935-9648

    Type of media:

    Article (Journal)

    Type of material:

    Print

    Language:

    English

    Classification:

    DDC:  620.11

    © Metadata Copyright the British Library Board and other contributors. All rights reserved.

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