Charge neutralization using secondary electron shower for shave-off depth profiling by focused ion beam secondary ion mass spectrometry: Fid-Bau Portal

Charge neutralization using secondary electron shower for shave-off depth profiling by focused ion beam secondary ion mass spectrometry

Ishizaki, Y. / Yamamoto, T. / Fujii, M. / Owari, M. / Nojima, M. / Nihei, Y.

Access

Access via TIB

Check availability in my library

Order at Subito €

Page navigation

Document information

Similar titles

Export, share and cite

Charge neutralization using secondary electron shower for shave-off depth profiling by focused ion beam secondary ion mass spectrometry

Ishizaki, Y. / Yamamoto, T. / Fujii, M. / Owari, M. / Nojima, M. / Nihei, Y.

Charge neutralization using secondary electron shower for shave-off depth profiling by focused ion beam secondary ion mass spectrometry

Ishizaki, Y. / Yamamoto, T. / Fujii, M. / Owari, M. / Nojima, M. / Nihei, Y.

Access

Access via TIB

Check availability in my library

Order at Subito €

Page navigation

Document information

Similar titles

Export, share and cite

Document information

Title:

Charge neutralization using secondary electron shower for shave-off depth profiling by focused ion beam secondary ion mass spectrometry

Contributors:

Ishizaki, Y. (author) / Yamamoto, T. (author) / Fujii, M. (author) / Owari, M. (author) / Nojima, M. (author) / Nihei, Y. (author)

Published in:

APPLIED SURFACE SCIENCE ; 255 ; 1351-1353

Publication date:

2008-01-01

Size:

3 pages

ISSN:

0169-4332

Type of media:

Article (Journal)

Type of material:

Language:

English

Classification:

DDC: 621.35

Sakamoto, T. / Yamaguchi, J. | British Library Online Contents | 2008

Shave-off depth profiling: Depth profiling with an absolute depth scale

Nojima, M. / Maekawa, A. / Yamamoto, T. et al. | British Library Online Contents | 2006

Depth profiling using ultra-low-energy secondary ion mass spectrometry

Dowsett, M. G. | British Library Online Contents | 2003

Highly accurate shave-off depth profiling by simulation method

Fujii, M. / Nakamura, K. / Ishizaki, Y. et al. | British Library Online Contents | 2008

Temperature-controlled depth profiling in polymeric materials using cluster secondary ion mass spectrometry (SIMS)

Mahoney, C. M. / Fahey, A. J. / Gillen, G. et al. | British Library Online Contents | 2006