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    Highly accurate shave-off depth profiling by simulation method

    New search for: Fujii, M.
    New search for: Nakamura, K.
    New search for: Ishizaki, Y.
    New search for: Nojima, M.
    New search for: Owari, M.
    New search for: Nihei, Y.

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    Highly accurate shave-off depth profiling by simulation method

    New search for: Fujii, M.
    New search for: Nakamura, K.
    New search for: Ishizaki, Y.
    New search for: Nojima, M.
    New search for: Owari, M.
    New search for: Nihei, Y.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Highly accurate shave-off depth profiling by simulation method

    New search for: Fujii, M.
    New search for: Nakamura, K.
    New search for: Ishizaki, Y.
    New search for: Nojima, M.
    New search for: Owari, M.
    New search for: Nihei, Y.

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Access

    Access via TIB
    Check availability in my library
    Order at Subito €

    Page navigation

    Document information
    Similar titles

    Export, share and cite

    Document information
    Title:

    Highly accurate shave-off depth profiling by simulation method

    Contributors:

    Fujii, M. (author) / Nakamura, K. (author) / Ishizaki, Y. (author) / Nojima, M. (author) / Owari, M. (author) / Nihei, Y. (author)

    Published in:

    APPLIED SURFACE SCIENCE ; 255 ; 1354-1356

    Publication date:

    2008-01-01

    Size:

    3 pages

    ISSN:

    0169-4332

    Type of media:

    Article (Journal)

    Type of material:

    Print

    Language:

    English

    Classification:

    DDC:  621.35

    © Metadata Copyright the British Library Board and other contributors. All rights reserved.

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